The Microengineering and Nanotechnology Research Centre was established in 1998 in Mechanical Engineering. The nanofabrication activity also includes facilities in Electrical Engineering, Physics and Chemistry (chemical lithography). Particular themes of research are micro electrical and mechanical systems (MEMS), sensors, thin films, electron beam lithography and chemical patterning of surfaces.
The table below details members of staff who carry out research in the area of nanoscience and key words which describe their research activity in this area. Click on their names to be taken to their home pages to find out more detailed information and how to contact them.
Prof. Stuart Abell
incorporation of nanoscale inclusions in bulk materials, nanoscale single and multilayer deposition
Dr Tim Button
net-shape forming of ceramic micro-components, applications of engineered ceramic micro-components and films - sensors and actuators, biomedical, energy communication
Dr Isaac Chang
fabrication of metallic microcomponents using powder metallurgical routes
Dr David Chapman
nanofabricated sensors
Dr Tony Childs
electronic devices
Prof. Graham Davies
micro Opto-electronic MEMS, Micro Fluidics, Micro Combustion Engines, III-V Semiconductors and devices
Prof. David Hukins
bio-medical applications
Dr Tim Jackson
thin film deposition, characterisation and analysis at microwave frequencies
Dr Kyle Jiang
fabricate micro structures in SU-8, Si, metals, PDMS and ceramics, develop microsensors and machines, including micronozzles, microchannels, micro wireless sensors and microengines, other nanofabrication work involves making nanochannels and other nanostructures.
Prof. Kevin Kendall
adhesion of cements, fabrication of calcium silicates, latex coalescence
Prof. Mike Lancaster
microfabrication, emerging device technology
Dr Ziyou Li
nanomaterials, thin film growth,
Dr Quanmin Quo
porous semiconductors, dry and wet etching of semiconductors
Dr Andrzej W Pacek
development of micro-rheometer, microfluidics
Prof. Richard Palmer
resists, fullerenes, triphenylenes, electron beam lithography, e-beam writing, plasma etching, RIE, photolithogrpahy, nanotips, molecular electronics, nanofabrication, photonics, nanomaterials, coatings, nanocoatings, nanocomposites, nanoceramics
Dr Clive Ponton
electrophoretic deposition, infiltration of nanoparticles, micro- and nano-engineered structures and composites
Prof. Jon Preece
C60 e-beam resists, triphenylene e-beam resists, nanolithography, lithography, e-beam lithography, scanning near field photolithography, x-ray lithography
Prof. Phil Prewett
microfabrication, nanotechnology
Dr Alex Robinson
electron beam lithography, electron beam resists
Prof. Owen Thomas
miniaturised biochemical assays, laminar flow patterning, magnetically assisted biofabrication and/or separation
Dr Mike Ward
physical sensors, microengineering, micromachining, micro systems engineering, nanomechanics, resonant sensors, structural health monitoring, sensor arrays, non-linear systems, FIB
Prof. Xin Yao
evolutionary optimisation
Prof. Zhibing Zhang
microrheology, high throughput liquid analyser
